Effects of amine- and pyridine-terminated molecular nanolayers on adhesion at Cu-SiO 2 interfaces

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 23, Issue 1, 2005, Pages 327-331

  Ganesan, P G ^a   Cui, G ^a   Vijayamohanan, K ^a   Lane, M ^b   Ramanath, G ^a  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

^b IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FRACTURE SURFACES; INFERIOR ADHESION; MOLECULAR NANOLAYERS (MNL); SOLUTION CONCENTRATION;

ADHESION; AMINES; ELECTRON SPECTROSCOPY; INTEGRATED CIRCUITS; INTERFACES (MATERIALS); MONOLAYERS; MULTILAYERS; NANOTECHNOLOGY; POLYMERIZATION; SILICA;

COPPER;

EID: 31344472905     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1856467     Document Type: Article

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