Dynamic analysis of torsional resonance mode of atomic force microscopy and its application to in-plane surface property extraction

Microsystem Technologies

Volumn 12, Issue 3, 2006, Pages 219-230

  Song, Yaxin ^a   Bhushan, Bharat ^a  

^a OHIO STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DYNAMIC MECHANICAL ANALYSIS; ELASTICITY; EXTRACTION; STIFFNESS; SURFACE PROPERTIES; VISCOSITY;

PARAMETRIC ANALYSIS; TIP-CANTILEVER SYSTEMS; TIP-SAMPLE INTERACTION; TORSIONAL RESONANCE (TR) MODES;

ATOMIC FORCE MICROSCOPY;

EID: 31144471598     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-005-0070-2     Document Type: Article

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