SCOPUS 정보 검색 플랫폼

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 23, Issue 5, 2005, Pages 2003-2006

Lithographic characterization of the field dependent astigmatism and alignment stability of a 0.3 numerical aperture extreme ultraviolet microfield optic

(3) Naulleau, Patrick P a Cain, Jason P b Goldberg, Kenneth A c

a STATE UNIVERSITY OF NEW YORK (United States)

b UNIVERSITY OF CALIFORNIA (United States)

c LAWRENCE BERKELEY NATIONAL LABORATORY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FIELD DEPENDENT ASTIGMATISM; LITHOGRAPHIC CHARACTERIZATION;

INTERFEROMETRY; LITHOGRAPHY;

ULTRAVIOLET RADIATION;

EID: 31144463852 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.2037647 Document Type: Article

Times cited : (11)

References (14)

1
- 0032652144
- R. Stulen and D. Sweeney, IEEE J. Quantum Electron. 35, 694 (1999).
- (1999) IEEE J. Quantum Electron. , vol.35 , pp. 694
- Stulen, R.¹ Sweeney, D.²

2
- 13244294226
- P. Naulleau, K. Goldberg, J. Cain, E. Anderson, P. Denham, K. Jackson, S. Rekawa, F. Salmassi, and G. Zhang, J. Vac. Sci. Technol. B 22, 2962 (2004).
- (2004) J. Vac. Sci. Technol. B , vol.22 , pp. 2962
- Naulleau, P.¹ Goldberg, K.² Cain, J.³ Anderson, E.⁴ Denham, P.⁵ Jackson, K.⁶ Rekawa, S.⁷ Salmassi, F.⁸ Zhang, G.⁹

3
- 31144468104
- P. Naulleau, K. Goldberg, E. Anderson, J. Cain, P. Denham, B. Hoef, K. Jackson, A. Morlens, S. Rekawa, and K. Dean, Proc. SPIE 5751 (to be published).
- Proc. SPIE , vol.5751
- Naulleau, P.¹ Goldberg, K.² Anderson, E.³ Cain, J.⁴ Denham, P.⁵ Hoef, B.⁶ Jackson, K.⁷ Morlens, A.⁸ Rekawa, S.⁹ Dean, K.¹⁰

4
- 1842510700
- P. Naulleau, P. Denham, B. Hoef, and S. Rekawa, Opt. Commun. 234, 53 (2004).
- (2004) Opt. Commun. , vol.234 , pp. 53
- Naulleau, P.¹ Denham, P.² Hoef, B.³ Rekawa, S.⁴

5
- 0027850133
- D. Attwood, G. Sommargren, R. Beguiristain, K. Nguyen, J. Bokor, N. Ceglio, K. Jackson, M. Koike, and J. Underwood, Appl. Opt. 32, 7022 (1993).
- (1993) Appl. Opt. , vol.32 , pp. 7022
- Attwood, D.¹ Sommargren, G.² Beguiristain, R.³ Nguyen, K.⁴ Bokor, J.⁵ Ceglio, N.⁶ Jackson, K.⁷ Koike, M.⁸ Underwood, J.⁹

6
- 1842563402
- C. Chang, P. Naulleau, E. Anderson, and D. Attwood, Opt. Commun. 182, 24 (2000).
- (2000) Opt. Commun. , vol.182 , pp. 24
- Chang, C.¹ Naulleau, P.² Anderson, E.³ Attwood, D.⁴

7
- 84858526223
- 2nd International EUVL Workshop, San Francisco, CA, 19-20 October
- J. Taylor, D. Sweeney, R. Hudyma, L. Hale, T. Decker, G. Kubiak, W. Sweatt, and N. Wester, 2nd International EUVL Workshop, San Francisco, CA, 19-20 October 2000 (proceedings available from SEMATECH, Austin, TX 78741, www.sematech.org).
- (2000)
- Taylor, J.¹ Sweeney, D.² Hudyma, R.³ Hale, L.⁴ Decker, T.⁵ Kubiak, G.⁶ Sweatt, W.⁷ Wester, N.⁸

8
- 84858518576
- 2nd International EUVL Workshop, San Francisco, CA, 19-20 October
- R. Hudyma, J. Taylor, D. Sweeney, L. Hale, W. Sweatt, and N. Wester, 2nd International EUVL Workshop, San Francisco, CA, 19-20 October 2000 (proceedings available from SEMATECH, Austin, TX 78741, www.sematech.org
- (2000)
- Hudyma, R.¹ Taylor, J.² Sweeney, D.³ Hale, L.⁴ Sweatt, W.⁵ Wester, N.⁶

9
- 0032664750
- P. Dirksen, C. Juffermans, R. Pellens, M. Maenhoudt, and P. Debisschop, Proc. SPIE 3679, 77 (1999).
- (1999) Proc. SPIE , vol.3679 , pp. 77
- Dirksen, P.¹ Juffermans, C.² Pellens, R.³ Maenhoudt, M.⁴ Debisschop, P.⁵

10
- 0040113724
- H. Fukuda, K. Hayano, and S. Shirai, J. Vac. Sci. Technol. B 17, 3318 (1999).
- (1999) J. Vac. Sci. Technol. B , vol.17 , pp. 3318
- Fukuda, H.¹ Hayano, K.² Shirai, S.³

11
- 0036120917
- G. Robins, K. Adam, and A. Neureuther, J. Vac. Sci. Technol. B 20, 338 (2002).
- (2002) J. Vac. Sci. Technol. B , vol.20 , pp. 338
- Robins, G.¹ Adam, K.² Neureuther, A.³

12
- 13244265984
- K. Goldberg, P. Naulleau, P. Denham, S. Rekawa, K. Jackson, E. Anderson, and J. Liddle, J. Vac. Sci. Technol. B 22, 2956 (2004).
- (2004) J. Vac. Sci. Technol. B , vol.22 , pp. 2956
- Goldberg, K.¹ Naulleau, P.² Denham, P.³ Rekawa, S.⁴ Jackson, K.⁵ Anderson, E.⁶ Liddle, J.⁷

13
- 3843137187
- P. Naulleau, K. Goldberg, E. Anderson, K. Bradley, R. Delano, P. Denham, R. Gunion, B. Harteneck, B. Hoef, H. Huang, K. Jackson, M. Jones, D. Kemp, J. Liddle, R. Oort, A. Rawlins, S. Rekawa, F. Salmassi, R. Tackaberry, C. Chung, L. Hale, D. Phillion, G. Sommargren, and H. Taylor, Proc. SPIE 5374, 881 (2004).
- (2004) Proc. SPIE , vol.5374 , pp. 881
- Naulleau, P.¹ Goldberg, K.² Anderson, E.³ Bradley, K.⁴ Delano, R.⁵ Denham, P.⁶ Gunion, R.⁷ Harteneck, B.⁸ Hoef, B.⁹ Huang, H.¹⁰ Jackson, K.¹¹ Jones, M.¹² Kemp, D.¹³ Liddle, J.¹⁴ Oort, R.¹⁵ Rawlins, A.¹⁶ Rekawa, S.¹⁷ Salmassi, F.¹⁸ Tackaberry, R.¹⁹ Chung, C.²⁰ more..

14
- 0000947837
- B. Bollepalli, M. Khan, and F. Cerrina, J. Vac. Sci. Technol. B 16, 3444 (1998).
- (1998) J. Vac. Sci. Technol. B , vol.16 , pp. 3444
- Bollepalli, B.¹ Khan, M.² Cerrina, F.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.