Multi-layer photopolymer micromachining

Materials Research Society Symposium Proceedings

Volumn 872, Issue , 2005, Pages 175-188

  Huang, J R ^a   Bai, B ^b   Shaw, J ^a   Jackson, T N ^b   Wei, C Y ^a   Manivannan, V ^a   Durocher, K ^a  

^a Global Research Center   (United States)

^b PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; MICROELECTROMECHANICAL DEVICES; PHOTOLITHOGRAPHY; PHOTOPOLYMERIZATION; PLASTIC FILMS; VISCOSITY;

MICROFLUIDIC CHANNEL LAYERS; MULTIPLE LAYERS; PHOTOPOLYMERS;

MICROMACHINING;

EID: 30644478979     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-872-j11.5     Document Type: Conference Paper

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