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IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 49, Issue 7, 2002, Pages 947-958

A micromachine high frequency ultrasound scanner using photolithographic fabrication

(2) Zara, Jason M a,b Smith, Stephen W a,b

a IEEE (United States)

b Duke University (United States)

Author keywords

[No Author keywords available]

Indexed keywords

POLYIMIDE FILMS;

COMPUTER SOFTWARE; FABRICATION; FREQUENCIES; MICROACTUATORS; MICROMACHINING; PERSONAL COMPUTERS; PHOTOLITHOGRAPHY; PLASTIC FILMS; POLYIMIDES; SUBSTRATES;

ULTRASONIC TRANSDUCERS;

POLYIMIDE RESIN; RESIN;

ARTICLE; ECHOGRAPHY; EQUIPMENT DESIGN; IMAGE QUALITY; INSTRUMENTATION; MATERIALS TESTING; TRANSDUCER;

EQUIPMENT DESIGN; MATERIALS TESTING; PHANTOMS, IMAGING; RESINS, SYNTHETIC; TRANSDUCERS; ULTRASONOGRAPHY;

EID: 0036628596 PISSN: 08853010 EISSN: None Source Type: Journal
DOI: 10.1109/TUFFC.2002.1020165 Document Type: Article

Times cited : (10)

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