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Volumn 48, Issue 12, 2005, Pages 102-116

The influence of the package environment on the functioning and reliability of capacitive RF-MEMS switches

Author keywords

[No Author keywords available]

Indexed keywords

MECHANICAL STRESSES; MEMS;

EID: 30344479820     PISSN: 01926225     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article
Times cited : (14)

References (17)
  • 4
    • 0036120530 scopus 로고    scopus 로고
    • Investigation of the hermetieity of BCB-sealed cavities for housing (RF)-MEMS devices
    • Las Vegas, NV
    • A. Jourdain, P. De Moor, S. Pamidighantam and H.A.C. Tilmans, "Investigation of the Hermetieity of BCB-sealed Cavities for Housing (RF)-MEMS Devices," Proceedings of MEMS2002, Las Vegas, NV, pp. 677-680.
    • Proceedings of MEMS2002 , pp. 677-680
    • Jourdain, A.1    De Moor, P.2    Pamidighantam, S.3    Tilmans, H.A.C.4
  • 5
    • 30344440171 scopus 로고    scopus 로고
    • The minipackage: A flexible wafer-level packaging solution for MEMS
    • November, Long Beach, CA
    • th Workahop on Packaging of MEMS, November 2004, Long Beach, CA.
    • (2004) th Workahop on Packaging of MEMS
    • De Moor, P.1
  • 7
    • 84945955393 scopus 로고    scopus 로고
    • Wafer-scale 0-level packaging of (RF)-MEMS devices using BCB
    • 5-7 May, Cannes, France
    • A. Jourdain, H. Ziad, P. De Moor and H.A.C. Tilmuns, "Wafer-scale 0-level Packaging of (RF)-MEMS Devices Using BCB," Proceedings of DTIP2003, 5-7 May, Cannes, France, pp. 239-244.
    • Proceedings of DTIP2003 , pp. 239-244
    • Jourdain, A.1    Ziad, H.2    De Moor, P.3    Tilmuns, H.A.C.4
  • 8
    • 30344458265 scopus 로고    scopus 로고
    • Veeco Instruments Inc., 100 Sunnyside Boulevard, Suite B, Woodbiuy, NY
    • Veeco Instruments Inc., 100 Sunnyside Boulevard, Suite B, Woodbiuy, NY.
  • 12
    • 0032208481 scopus 로고    scopus 로고
    • Parasitic charging of dielectric surfaces in capacitive Microelectromechanical Systems (MEMS)
    • J. Wibbcler, G. Pfeifer and M. Hietschold, "Parasitic Charging of Dielectric Surfaces in Capacitive Microelectromechanical Systems (MEMS) Sensors and Actuators A, Vol 71, 1998, pp. 74-80.
    • (1998) Sensors and Actuators A , vol.71 , pp. 74-80
    • Wibbcler, J.1    Pfeifer, G.2    Hietschold, M.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.