High-Q integrated RF passives and RF-MEMS on silicon

Materials Research Society Symposium - Proceedings

Volumn 783, Issue , 2003, Pages 97-108

  Van Beek, Joost T M ^a   Van Delden, Marc H W M ^a   Van Dijken, Auke ^a   Van Eerd, Patrick ^a   Jansman, Andre B M ^a   Kemmeren, Anton L A M ^a   Rijks, Theo G S M ^a   Steeneken, Peter G ^a   Den Toonder, Jaap ^a   Ulenaers, Mathieu J E ^a   Den Dekker, Arnold ^b   Lok, Pieter ^b   Pulsford, Nick ^b   Van Straten, Freek ^b   Van Teeffelen, Lenhard ^b   De Coster, Jeroen ^c   Puers, Robert ^c  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

^b NXP SEMICONDUCTORS   (Netherlands)

^c UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHIZATION; CAPACITORS; ELECTRIC INDUCTORS; ELECTRIC RESISTANCE; POLYCRYSTALLINE MATERIALS; SILICON; SUBSTRATES;

LOW-LOSS INDUCTORS; MOBILE TELEVISION; SWITCHING FACTOR;

MICROELECTROMECHANICAL DEVICES;

EID: 3042624549     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-783-b3.1     Document Type: Conference Paper

References (13)

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