Parallel simulation of ion implantation for multi-component targets using Boltzmann transport equation

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 37, Issue 7 PART A, 1998, Pages

  Wang, Shyh Wei ^a   Guo, Shuang Fa ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

Exact nuclear scattering cross section; Multi component target; Non uniform energy grid momentum matrix; Parallel processing

Indexed keywords

ARSENIC; COMPUTER SIMULATION; INTEGRAL EQUATIONS; MATRIX ALGEBRA; PARALLEL PROCESSING SYSTEMS; SCATTERING; SEMICONDUCTOR DOPING;

BOLTZMANN TRANSPORT EQUATION; MULTICOMPONENT TARGETS; NUCLEAR SCATTERING CROSS SECTION;

ION IMPLANTATION;

EID: 0032117642     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.l781     Document Type: Article

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