MBE growth and properties of ZnO on sapphire and SiC substrates

Journal of Electronic Materials

Volumn 25, Issue 5, 1996, Pages 855-862

  Johnson, M A L ^a   Fujita, Shizuo ^a,b   Rowland Jr , W H ^a   Hughes, W C ^a   Cook Jr , J W ^a   Schetzina, J F ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

^b KYOTO UNIVERSITY   (Japan)

Author keywords

GaN; Molecular beam epitaxy (MBE); Oxygen plasma; Reflected high energy electron diffraction; ZnO

Indexed keywords

EID: 0001397118     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02666649     Document Type: Article

References (18)

1. S. Strite and H. Morkoç J. Vac. Sci. Technol. B 10, 1237 (1992).
2. S. Nakamura, T, Mukai and M. Senoh, Appl. Phys. Lett. 64, 1687 (1994).
3. I. Akasaki, H. Amano,Y. Koide, K. Hiramatsu and N. Sawaki, J. Cryst. Growth 98, 209 (1989).
4. S. Nakamura, Jpn. J. Appl. Phys. 30, L1705 (1991).
5. S.D. Lester, F.A. Ponce, M.G. Craford and D.A. Steigerwald, Appl. Phys. Lett. 66, 1249 (1995).
6. J.H. Edgar, ed. Properties of Group III Nitrides (Exeter, UK: INSPEC Institute of Electrical Engineers, 1994).
7. Numerical Data and Functional Relationships in Science and Technology, Vol. 17 of Landolt-Bornstein New Series (Berlin: Springer-Verlag, 1982).
8. G. Martin, S. Strite, A. Botchkarev, A. Agarwal, A. Rockett, H. Morkoç, W.R.L. Lambrecht and B. Segall, Appl. Phys. Lett. 65, 610 (1994).
9. M.C. Benjamin, C. Wang, R.F. Davis and R.J. Nemanich, Appl. Phys. Lett. 64, 3288 (1994).
10. J. Baur, K. Maier, M. Kunzer, U. Kaufmann and J. Schneider, Appl. Phys. Lett. 65, 2211 (1994).
11. J. Ren, D.B. Eason, L.E. Churchill, Z. Yu, C. Boney, J.W. Cook, Jr., J.F. Schetzina and N.A. El-Masry, J. Cryst. Growth 138, 455 (1994).
12. T. Minami, H. Nanto and S. Takata, Jpn. J. Appl. Phys. 23, L280 (1984).
13. A.P. Roth and D.F. Williams, J. Electrochem. Soc. 128, 2684 (1981).
14. T. Duetchprom, K. Hiramatsu, H. Amano and I. Akasaki, Appl. Phys. Lett. 61, 2688 (1992).
15. Handbook of Chemistry and Physics, 72ed. (Boca Raton: CRC Press, 1991).
16. M.E. Lin, S. Strite, A. Agarwal, A. Salvador, G.L. Zhou, N. Teraguchi, A. Rockett and H. Morkoç, Appl. Phys. Lett. 62, 702 (1993).
17. W.C. Hughes, W.H. Rowland, M.A.L. Johnson, J.W. Cook Jr., J.F. Schetzina, J. Ren and J.A. Edmond, J. Vac. Sci. and Technol. B 13, 1571 (1995).
18. C.E. Moore, Tables of Spectra of Hydrogen, Carbon, Nitrogen, and Oxygen Atoms and Ions (Boca Raton: CRC Press, 1993).