Quality improvement of ZnO layer on LT-grown ZnO layer/Si(1 1 1) through a two-step growth using an RF magnetron sputtering

Journal of Crystal Growth

Volumn 264, Issue 1-3, 2004, Pages 327-333

  Jeong, Sang Hun ^a   Kim, Il Soo ^a   Kim, Jae keun ^a   Lee, Byung Teak ^a  

^a Chonnam National University   (South Korea)

Author keywords

A1. RF magnetron sputtering; A2. Two step growth; B1. ZnO on LT ZnO

Indexed keywords

ATOMIC FORCE MICROSCOPY; BINDING ENERGY; CRYSTAL DEFECTS; EXCITONS; MAGNETRON SPUTTERING; PHOTOLUMINESCENCE; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR LASERS; X RAY DIFFRACTION ANALYSIS; ZINC OXIDE;

RF MAGNETRON SPUTTERING; TWO-STEP GROWTH; ZNO ON LT-ZNO;

CRYSTAL GROWTH;

EID: 1342264110     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2004.01.006     Document Type: Article

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