Micromachined microsensors for manufacturing

IEEE Instrumentation and Measurement Magazine

Volumn 7, Issue 2, 2004, Pages 20-26

  Gao, Robert ^a   Zhang, Li ^a  

^a University of Massachusetts   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; ACOUSTIC EMISSIONS; CAPACITANCE; ELECTROMAGNETIC WAVE INTERFERENCE; MICROELECTROMECHANICAL DEVICES; MICROELECTRONICS; MICROMACHINING; MICROPROCESSOR CHIPS; OPTICAL FIBERS; PIEZOELECTRIC DEVICES; PROCESS CONTROL; SIGNAL PROCESSING;

MANUFACTURING PROCESS CONTROL; MICROELECTROMECHANICAL SYSTEMS; MICROMACHINED MICROSENSORS; PRESSURE SENSORS;

MICROSENSORS;

EID: 2942726469     PISSN: 10946969     EISSN: None     Source Type: Journal    
DOI: 10.1109/MIM.2004.1304562     Document Type: Article

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