CHEMICAL MICROSENSORS BASED ON SURFACE IMPEDANCE CHANGES.

ACS Symposium Series

Volumn , Issue , 1986, Pages 166-176

  Senturia, Stephen D ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA - HYDRATED; OXIDES - THIN FILMS; SEMICONDUCTOR DEVICES, MOSFET; SURFACES - IMPEDANCE MATCHING; TRANSISTORS - APPLICATIONS;

CHARGE-FLOW TRANSISTORS; MICROSENSORS;

CHEMICALS;

EID: 0022862272     PISSN: 00976156     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (27)