Micromachined accelerometer based on electron tunneling

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3891, Issue , 1999, Pages 121-125

  Yang, Yongjun ^a   Li, Li,jie ^a   Xu, Yongqing ^a   Zhao, Yanjun ^a   Liang, Chunguang ^a   Wei, Tongli ^a  

^a SOUTHEAST UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; ELECTRON TUNNELING; MICROMACHINING;

BULK SILICON FABRICATION TECHNOLOGY;

MICROELECTROMECHANICAL DEVICES;

EID: 0033332864     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)