Nanoporous ultra-low-κ fluoropolymer composite films via plasma polymerization of allylpentafluorobenzene and magnetron sputtering of poly(tetrafluoroethylene)

Advanced Materials

Volumn 16, Issue 9-10, 2004, Pages 839-842

  Fu, Guo Dong ^a   Zhang, Yan ^a   Kang, En Tang ^a   Neoh, Koon Gee ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; COPOLYMERS; FLUORINE CONTAINING POLYMERS; MAGNETRON SPUTTERING; NANOSTRUCTURED MATERIALS; ORGANIC SOLVENTS; PLASMA POLYMERIZATION; SCANNING ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

FLUOROPOLYMER FILM; ULTRA LOW ENERGY;

DIELECTRIC FILMS;

EID: 2942604537     PISSN: 09359648     EISSN: None     Source Type: Journal    
DOI: 10.1002/adma.200306290     Document Type: Article

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