Pulsed plasma polymerization of tetramethyltin: Nanoscale compositional control of film chemistry

Chemistry of Materials

Volumn 8, Issue 5, 1996, Pages 1067-1077

  Chen, Xiaolan ^a   Rajeshwar, Krishnan ^a   Timmons, Richard B ^a   Chen, Jin Jian ^b   Chyan, Oliver M R ^b  

^a UNIVERSITY OF TEXAS AT ARLINGTON   (United States)

^b UNIVERSITY OF NORTH TEXAS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000492355     PISSN: 08974756     EISSN: None     Source Type: Journal    
DOI: 10.1021/cm9504854     Document Type: Article

References (31)

1. Tkachuk, B. V.; Kobtsev, Yu. D.; Laurs, E. P.; Mikhalchenko, V. I.; Marusii, N. Ya. Iv. Vyssh. Uchebn. Zaved. Fiz. 1972, 15, 177.
2. Tkachuk, B. V.; Marusii, N. Ya.; Laurs, E. P. Vysokomol. Soedin., Ser. A 1973, 15, 2046.
3. Inagaki, N.; Tasaka, S.; Mase, T. J. Appl. Polym. Sci. 1989, 37, 2341.
4. Ingaki, N. J. Appl. Polym. Sci.: Appl. Polym. Symp. 1988, 42, 221.
5. Inagaki, N.; Hashimoto, Y. Polymeric Materials: Science and Engineering, Proceedings of ACS Division of Polymeric Materials, Science and Engineering 1987, 56, 515.
6. Oehr, C.; Suhr, H. Thin Solid Films 1987, 155, 65
7. Ying, T. H.; Sarmadi, A. M.; Hop, C. E. C. A.; Denes, F. J. Polym. Sci. 1995, 55, 1537.
8. Kny, E.; Levenson, L. L.; James, W. J.; Auerbach, R. A. Thin Solid Films 1979, 64, 395.
9. Kny, E.; Levenson, L. L.; James, W. J.; Auerbach, R. A. J. Phys. Chem. 1980, 84, 1635.
10. Kny, E.; Levenson, L. L.; James, W. J.; Auerbach, R. A. Thin Solid Films 1981, 85, 23.
11. Suhr, H.; Etspüler, A.; Feurer, E.; Oehr, C. Plasma Chem. Plasma Processing 1988, 8, 9.
12. Sadhir, R. K.; James, W. J.; Auerbach, R. A. Thin Solid Films 1982, 97, 17.
13. Sadhir, R. K.; Saunders, H. E. J. Vac. Sci. Technol. 1985, A3, 2092.
14. Eifert, H.; Lehmberg, H.; Pagnia, H. Int. J. Electron. 1991, 70, 527.
15. Inagaki, N.; Yagi, T.; Katsuura, K. Eur. Polym. J. 1982, 18, 621.
16. Inagaki, N.; Tasaka, S.; Suzuki, K. J. Appl. Polym. Sci.: Appl. Polym. Symp. 1990, 46, 173.
17. Chen, Y. M.; O'Keefe, T. J.; James, W. J. Thin Solid Films 1985, 129, 205.
18. Yamada, H.; Satoh, T.; Itoh, S.; Nakamura, M.; Morita, S.; Hattori, S. J. Appl. Polym. Sci., Appl. Polym. Symp. 1988, 42, 157.
19. Wang, D.; Chen, J. J. Appl. Polym. Sci. 1991, 42, 233.
20. Angadi, M. A.; Udachan, L. A. Thin Solid Films 1981, 78, 299.
21. Yasuda, H. Plasma Polymerization; Academic Press: New York, 1985.
22. Savage, C. R ; Timmons, R B.; Lin, J. W. Chem Mater. 1991, 3, 375.
23. Panchalingam, V.; Poon, B.; Huo, H.-H.; Savage, C. R.; Timmons, R. B.; Eberhart, R. C. J. Biomater. Sci. Polym. Ed. 1993, 5, 131.
24. Panchalingam, V.; Chen, X.; Savage, C. R.; Timmons, R. B.; Eberhart, R. C. J. Appl. Polym. Sci.: Appl. Polym. Symp. 1994, 54, 123.
25. Rinsch, C. L.; Chen, X.; Panchalingam, V.; Savage, C. R.; Wang, J.-H.; Eberhart, R. C.; Timmons, R. B. ACS Polym. Prepr. 1995, 36, 95.
26. Morgan, W. E.; Van Wazer, J. R. J. Phys. Chem. 1973, 77, 964
27. Willemen, H.; Van De Vondel, D. F.; Van Der Kelen, G. P. Inorg. Chim. Acta 1979, 34, 175.
28. Themlin, J.-M.; Chtaib, M.; Henrard, L.; Lambin, P.; Darville, J.; Gilles, J.-M. Phys. Rev. B 1992, 46, 45.
29. Grutsch, P. A.; Zeller, M. V.; Fehlner, T. P. Inorg. Chem. 1973, 12, 1431.
30. McIntyre, N. S.; Sunder, S.; Shoesmith, D. W.; Stanchell, F. W. J. Vac. Sci. Technol. 1981, 18, 714.
31. Lin, A. W. C.; Armstrong, N. R.; Kuwana, T. Anal. Chem. 1977, 49, 1228.