Brillouin light scattering characterization of the surface acoustic wave velocity in the ZnO/ Si3N4 /Si(100) system

Superlattices and Microstructures

Volumn 39, Issue 1-4, 2006, Pages 75-82

  Cespedes E ^a   Jimenez Rioboo R J ^a   Vila, M ^a   Prieto, C ^a  

^a INSTITUTO DE CIENCIA DE MATERIALES DE MADRID   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVE VELOCITY; BRILLOUIN SCATTERING; MAGNETRON SPUTTERING; SILICON NITRIDE; SPECTROSCOPIC ANALYSIS; ZINC OXIDE;

BRILLOUIN LIGHT SCATTERING; ELASTIC CONSTANTS; INTERMEDIATE LAYER; SURFACE ACOUSTIC WAVE VELOCITY;

THIN FILMS;

EID: 29344440058     PISSN: 07496036     EISSN: 10963677     Source Type: Journal    
DOI: 10.1016/j.spmi.2005.08.032     Document Type: Article

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