Growth of AlN films and diamond/AlN layer system application in acoustoelectronics

Journal of Wide Bandgap Materials

Volumn 5, Issue 3, 1997, Pages 267-272

  Belyanin, A F ^a   Blaut Blachev, A N ^b   Bouilov, L L ^b   Spitsyn, B V ^b  

^a Central R and D institute TECHNOMASH   (Russian Federation)

^b RUSSIAN ACADEMY OF SCIENCES   (Russian Federation)

Author keywords

Acoustoelectronics; AlN films; Diamond CVD; RF magnetron sputtering

Indexed keywords

ACOUSTIC DEVICES; ACOUSTIC SURFACE WAVE FILTERS; ALUMINUM NITRIDE; CHEMICAL VAPOR DEPOSITION; DIAMONDS; ELECTRONIC EQUIPMENT; FILM GROWTH; MAGNETRON SPUTTERING; POLYCRYSTALLINE MATERIALS;

ACOUSTOELECTRONICS; GAS MIXTURE; GROWTH CONDITIONS; RF MAGNETRON SPUTTERING;

THIN FILMS;

EID: 23844449165     PISSN: 1524511X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (6)

1. Davis, R. F. 1991. "III-V Nitrides for Electronic and Optoelectronic Applications," Proceedings of the IEEE, 79-5:702.
2. Belyanin, A. F. 1996. "AlN Films Manufacturing (Review)," Materialy VII Mezhdunarodnogo Simposiuma "Tonkie plyonki v electronike" [in Russian], Russia, Yoshkar-Ola, pp. 167-213.
3. Belyanin, A. F., N. A. Bulyonkov, A. B. Bogomolov and V. G. Balakirev. 1990. "Composition and Applications of Thin AlN Films Obtained by RF Magnetron Sputtering" [in Russian], Tehnika sredstv svyazi, ser. TPO, vyp. 3, pp. 4-24.
4. Belyanin, A. F., P.V. Pastchenko and A. P. Semenov. 1991. RF Magnetron Sputtering Setup for Growing Thin Films" [in Russian], Pribory i tehnika experimenta, N3, pp. 220-222.
5. Alexenko, A. E., A. F. Belyanin, A. A. Botev, L. L. Bouilov, P.V. Pastchenko and B. V. Spitsyn. 1995. "The Setup Constructions for Polycrystalline Diamond Film Growing by Means of Arc Discharge," Materialy VI Mezhdunarodnogo Simposiuma "Tonkie plyonki v electronike," [in Russian], Ukraine, Herson, pp. 17-26.
6. Bouilov, L. L., A. E. Alexenko, A. A. Botev and B. V. Spitsyn. 1986. "Certain Characteristics of the Growth of Diamond Layers from an Active Gas Phase," Soviet Physical Chemistry, pp. 302-306.