Effect of dielectric layer in ZnO/dielectric/Si layered structure on GSAW and HVPSAW propagation properties

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 2000, Pages 353-356

  Choi, K H ^a   Kim, Jin Yong ^a   Kim, Hyeong Joon ^a   Yang, Hyung Kook ^a   Park, Jong Chul ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SURFACE WAVE FILTERS; ACOUSTIC WAVE PROPAGATION; CRYSTAL STRUCTURE; PIEZOELECTRICITY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICA; THIN FILMS; TITANIUM DIOXIDE;

DIELECTRIC LAYERS;

DIELECTRIC FILMS;

EID: 0034580016     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)