Improvement in total measurement uncertainty for gate CD control

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5878, Issue , 2005, Pages 1-12

  Bunday, Benjamin D ^a   Sorkhabi, Osman ^b   Wen, Youxian ^b   Paranjpe, Ajit ^b   Terbeek, Paul ^b   Allgair, John ^a   Peterson, Amy ^a  

^a SEMATECH   (United States)

^b Therma Wave Inc   (United States)

Author keywords

Accuracy; CD; Critical dimension; Metrology; OCD; Optical modeling; Scatterometry; TMU; Total Measurement Uncertainty

Indexed keywords

CRITICAL DIMENSION; OCD; OPTIAL MODELING; TOTAL MEASUREMENT UNCERTAINTY;

DATA ACQUISITION; ELECTROMAGNETIC WAVE SCATTERING; REAL TIME SYSTEMS; REGRESSION ANALYSIS;

UNCERTAIN SYSTEMS;

EID: 29244449878     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.616344     Document Type: Conference Paper

References (18)

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