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Volumn 15, Issue 1, 2006, Pages 55-60
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The effect of substrate surface roughness on the nucleation of cubic boron nitride films
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Author keywords
Boron nitride interface; Cubic boron nitride; Mass selected ion beam deposition; Surface roughness; Turbostratic boron nitride
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Indexed keywords
DEPOSITION;
INTERFACES (MATERIALS);
ION BEAMS;
NUCLEATION;
SUBSTRATES;
SURFACE ROUGHNESS;
BORON NITRIDE INTERFACES;
MASS-SELECTED ION BEAM DEPOSITION (MSIBD);
MECHANICAL SCRATCHING;
TURBOSTRATIC BORON NITRIDE;
CUBIC BORON NITRIDE;
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EID: 29144513160
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/j.diamond.2005.07.009 Document Type: Article |
Times cited : (18)
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References (24)
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