Crystallography and structural evolution of cubic boron nitride films during bias sputter deposition

Acta Materialia

Volumn 48, Issue 14, 2000, Pages 3745-3759

  Shtansky, D V ^a   Tsuda, O ^a   Ikuhara, Y ^a   Yoshida, T ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ATOMIC STRUCTURE; CRYSTAL MICROSTRUCTURE; CRYSTAL ORIENTATION; CRYSTALLOGRAPHY; FILM GROWTH; GRAIN BOUNDARIES; NUCLEATION; SILICON WAFERS; SPUTTER DEPOSITION; TWINNING; VAPOR DEPOSITION;

PHYSICAL VAPOR DEPOSITION (PVD);

CUBIC BORON NITRIDE;

EID: 0034274201     PISSN: 13596454     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1359-6454(00)00159-2     Document Type: Article

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