Thermally actuated, bistable, oxide/silicon/metal membranes

Journal of Micromechanics and Microengineering

Volumn 16, Issue 1, 2006, Pages 40-47

  Arya, R ^a   Rashid, M M ^a   Howard, D ^a   Collins, S D ^b   Smith, R L ^a,b  

^a Davis   (United States)

^b UNIVERSITY OF MAINE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BUCKLING; OXIDES; SILICA; SILICON WAFERS; THERMAL EFFECTS; THERMOMECHANICAL TREATMENT;

COMPOSITE MEMBRANES; SILICON MEMBRANES; TEMPERATURE INDICATORS; THERMOMECHANICAL BEHAVIOR;

PERMSELECTIVE MEMBRANES;

EID: 29144499461     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/1/006     Document Type: Article

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