Magnetic materials for MEMS applications

Journal of Physics D: Applied Physics

Volumn 37, Issue 22, 2004, Pages

  Gibbs, M R J ^a   Hill, E W ^b   Wright, P J ^c  

^a UNIVERSITY OF SHEFFIELD   (United Kingdom)

^b UNIVERSITY OF MANCHESTER   (United Kingdom)

^c QINETIQ   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; ELECTRIC MOTORS; MAGNETIC MATERIALS; NATURAL FREQUENCIES; PERMANENT MAGNETS; PHOTOLITHOGRAPHY;

ELECTROSTATIC PRINCIPLES; MAGNETIC FIELD SENSORS; MAGNETOELASTIC MATERIALS; MOORE'S LAW;

MICROELECTROMECHANICAL DEVICES;

EID: 10044221049     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/37/22/R01     Document Type: Review

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