Oxidation of Ni-toughened nc-TiN/a-SiNx nanocomposite thin films

Journal of Materials Research

Volumn 20, Issue 10, 2005, Pages 2754-2762

  Zhang, Sam ^a   Sun, Deen ^a   Zeng, Xianting ^b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; COMPOSITION; MAGNETRON SPUTTERING; MICROSTRUCTURE; OXIDATION; OXIDATION RESISTANCE; SILICON NITRIDE; SUBSTRATES; THIN FILMS; TITANIUM NITRIDE; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

FILM CHARACTERIZATION; NANOCOMPOSITE THIN FILMS;

NANOSTRUCTURED MATERIALS;

EID: 29144486108     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.2005.0357     Document Type: Article

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