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Surface and Coatings Technology

Volumn 200, Issue 5-6, 2005, Pages 1530-1534

Ni-toughened nc-TiN/a-SiNx nanocomposite thin films

(5) Zhang, Sam a Sun, Deen a Fu, Yongqing a Pei, Y T b De Hosson, J Th M b

a NANYANG TECHNOLOGICAL UNIVERSITY (Singapore)

b UNIVERSITY OF GRONINGEN (Netherlands)

Author keywords

Hardness; Nanostructures; nc TiN a SiNx films; Sputtering; Toughness

Indexed keywords

COMPOSITION; CRYSTAL MICROSTRUCTURE; HARDNESS; INDENTATION; MECHANICAL PROPERTIES; NANOSTRUCTURED MATERIALS; NICKEL; SILICON NITRIDE; SPUTTERING; THIN FILMS; TITANIUM NITRIDE; TOUGHNESS;

MICROINDENTATION METHOD; NANOCOMPOSITE THIN FILMS; TARGET POWER RATIO;

INORGANIC COATINGS;

COATING;

EID: 28844493675 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2005.08.080 Document Type: Article

Times cited : (72)

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