Thermodynamic and kinetic criteria for layer exchange in amorphous silicon/crystalline aluminium bilayers during annealing

Scripta Materialia

Volumn 54, Issue 4 SPEC. ISS., 2006, Pages 559-561

  He, D ^a   Wang, J Y ^a   Mittemeijer, E J ^a  

^a MAX PLANCK INSTITUTE FOR INTELLIGENT SYSTEMS   (Germany)

Author keywords

Aluminium induced Si crystallization; Layer exchange; Thermodynamic analysis

Indexed keywords

ALUMINUM; ANNEALING; CRYSTALLINE MATERIALS; CRYSTALLIZATION; DIFFUSION; GIBBS FREE ENERGY; GRAIN BOUNDARIES; REACTION KINETICS; THERMODYNAMICS;

ALUMINUM-INDUCED SI CRYSTALLIZATION; BILAYERS; LAYER EXCHANGE; THERMODYNAMIC ANALYSIS;

AMORPHOUS SILICON;

EID: 28544433505     PISSN: 13596462     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.scriptamat.2005.10.057     Document Type: Article

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