Analysis of the Σ-Δ pulsed digital oscillator for MEMS

IEEE Transactions on Circuits and Systems I: Regular Papers

Volumn 52, Issue 11, 2005, Pages 2286-2297

  Domínguez, Manuel ^a   Pons Nin, Joan ^a   Ricart, Jordi ^a   Bermejo, Agustín ^a   Costa, Eduardo Figueras ^b   Morata, Marta ^b  

^a UNIVERSITAT POLITÈCNICA DE CATALUNYA   (Spain)

^b UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

Author keywords

Micromechanical system (MEMS) devices; Oscillators; Sigma delta modulation

Indexed keywords

ACTUATORS; CIRCUIT OSCILLATIONS; COMPUTER SIMULATION; DAMPING; DELTA SIGMA MODULATION; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; RESONATORS; SENSORS; THERMOELECTRICITY;

DIGITAL OSCILLATORS; DISCRETE TIME SIMULATION; OSCILLATION FREQUENCY; PIEZORESISTIVE POSITION SENSING; THERMOELECTRIC ACTUATION;

OSCILLATORS (ELECTRONIC);

EID: 28444473504     PISSN: 10577122     EISSN: None     Source Type: Journal    
DOI: 10.1109/TCSI.2005.853912     Document Type: Article

References (20)

1. A. J. Harris, J. S. Burdess, J. Cruickshank, D. Wood, and G. Cooper, "A silicon membrane gyroscope with electrostatic actuation," in Inst. Coloq. Silicon Fabricated Inertial Instruments, London, U.K., 1996, pp. 5/1-5/7.
2. S. Lee, S. Park, J. Kim, S. Lee, and D.-I. Cho, "Surface/bulk micromachined single-crystalline-silicon micro-gyroscope," J. Microelectromech. Syst., vol. 9, no. 4, pp. 557-567, 2000.
3. H. Luo, X. Zhu, H. Lakdawala, L. R. Carley, and G. K. Fedder, "A copper CMOS-MEMS Z axis gyroscope," in Proc. Micro Electro Mechan. Syst. 2002, Las Vegas, NV, 2002, pp. 631-634.
4. S. Sung, J. G. Lee, T. Kang, and J. W. Song, "Development of a tunable resonant accelerometer with self-sustained oscillation loop," in Proc. NAECON 2000, Dayton, OH, 2000, pp. 354-361.
5. B.-L. Lee, C.-H. Oh, S. Lee, Y.-S. Oh, and K.-J. Chun, "A vacuum packaged differential resonant accelerometer using gap sensitive electrostatic stiffness changing effect," in Proc. MEMS 2000, Miyazaki, Japan, Jan. 2000, pp. 352-357.
6. K. Wang, A.-C. Wong, and C.-T. Nguyen, "VHF free-free beam high-Q micromechanical resonators," J. Microelectromech. Syst., vol. 9, no. 3, pp. 347-360, 2000.
7. A.-C. Wong and C.-T. Nguyen, "Micromechanical mixed filters ("Mixlers")," J. Microelectromech. Syst., vol. 13, no. 1, pp. 100-112, 2004.
8. V. Beroulle, Y. Bertrand, L. Laforre, and P. Nouet, "14 MHz micromechanical oscillator," Sens. Actuators Phys. A, vol. 97-98, pp. 497-502, 2001.
9. V. Beroulle, Y. Bertrand, L. Laforre, and P. Nouet, "Evaluation of the oscillation-based test methodology for micro-electro-mechanical systems," in Proc, VLSI Test Symp., 2002 (VTS 2002), 2002, pp. 439-444.
10. T. Ono, D. F. Wang, and M. Esashi, "Mass sensing with resonating ultrathin double beams," in Proc. IEEE Sens., 2003, vol. 2, 2003, pp. 825-829.
11. C. Hagleitner, D. Lange, A. Hielermann, O. Brand, and H. Baltes, "CMOS single-chip gas detection system comprising capacitive, calorimetric, and mass-sensitive microsensors," IEEE J. Solid-State Circuits, vol. 37, no. 12, pp. 1867-1878, 2002.
12. J. Bienstman, R. Puers, and J. Vandewalle, "Periodic and chaotic behavior of the autonomous impact resonator," in Proc. MEMS-1998, 1998, pp. 562-567.
13. J. Bienstman, H. A. C. Tilmans, M. Steyaert, and R. Puers, "An oscillator circuit for electrostatically driven silicon-based one-port resonators," Eurosensors IX. Transducers'95, pp. 146-149, 1995.
14. M. Dominguez, J. Pons, J. Ricart, and A. Bermejo, "A sigma-delta digital oscillator for MEMS," in Proc. IEEE Int. Conf. on Sensors (Sensors 2003), Toronto, Canada, Oct. 2003, pp. 834-838.
15. L. Castañer, J. Pons, R. Nadal-Guardia, and A. Rodríguez, "Analysis of the extended operation range of electrostatic actuators by current-pulse drive," Sens. Actuators Phys. A. vol. 90, pp. 181-190, 2001.
16. A. K. Lu and G. W. Roberts, "An oversampling-based analog multitone signal generator," IEEE Trans. Circuits Syst. II, Analog Digit. Signal Process., vol. 45, no. 3, pp. 391-394, 1998.
17. B. R. Veilette and G. W. Roberts, "High frequency sinusoidal generation using delta-sigma modulation techniques," in Proc. ISCAS 1995, 1995, pp. 637-640.
18. M. Domínguez, F. N. Masana, V. Jiménez, S. Bermejo, J. Amirola, J. Ballester, N. Fueyo, and L. Castaner, "Low cost thermal S-D air flow sensor," IEEE Sens. J., vol. 2, no. 5. pp. 453-462, 2002.
19. S. P. Pacheco, L. P. B. Katehi, and C. T. Nguyen, "Design of low actuation voltage RF MEMS switch," IEEE MTT-S Int. Microwave Symp. Dig. 2000, vol. 1, pp. 165-168, 2000.
20. S. Pacheco, C. T. Nguyen, and L. P. B. Katehi, "Micromechanical electrostatic K-band switches," in IEEE MTT-S Int. Microwave Symp. Dig. 1998, vol. 3, 1998, pp. 1569-1572.