A Sigma-Delta Digital Oscillator for MEMS

Proceedings of IEEE Sensors

Volumn 2, Issue 2, 2003, Pages 834-838

  Domínguez, Manuel ^a   Pons, Joan ^a   Ricart, Jordi ^a   Bermejo, Agustín ^a  

^a UNIVERSITAT POLITÈCNICA DE CATALUNYA   (Spain)

Author keywords

MEMS; Oscillator; Sigma delta

Indexed keywords

ACTUATORS; COMPUTER SIMULATION; DAMPING; DELTA SIGMA MODULATION; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; OSCILLATIONS; PERMITTIVITY; RESONATORS; SENSORS;

MEMS; SIGMA-DELTA;

OSCILLATORS (MECHANICAL);

EID: 1542363445     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

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