Evaluation of the oscillation-based test methodology for micro-electro-mechanical systems

Proceedings of the IEEE VLSI Test Symposium

Volumn 2002-January, Issue , 2002, Pages 439-444

  Beroulle, V ^a   Bertrand, Y ^a   Latorre, L ^a   Nouet, P ^a  

^a LIRMM   (France)

Author keywords

Circuit faults; Circuit testing; Costs; Magnetic sensors; Mechanical sensors; Microelectromechanical systems; Micromechanical devices; Packaging; Production; System testing

Indexed keywords

COSTS; ELECTROMECHANICAL DEVICES; MAGNETIC SENSORS; MICROELECTROMECHANICAL DEVICES; PACKAGING; PRODUCTION; VLSI CIRCUITS;

CIRCUIT FAULTS; CIRCUIT TESTING; MECHANICAL SENSORS; MICROMECHANICAL DEVICE; SYSTEM TESTING;

MEMS;

EID: 15844420459     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/VTS.2002.1011177     Document Type: Conference Paper

References (8)

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