Self-compensating design for focus variation

Proceedings - Design Automation Conference

Volumn , Issue , 2005, Pages 365-368

  Gupta, Puneet ^a   Kahng, Andrew B ^a   Kim, Youngmin ^b   Sylvester, Dennis ^b  

^a Blaze DfM   (United States)

^b University of Michigan   (United States)

Author keywords

ACLV; Compensation; Focus; Layout; Manufacturability; Variation

Indexed keywords

ERROR COMPENSATION; INTEGRATED CIRCUIT LAYOUT; INTEGRATED CIRCUITS; MICROPROCESSOR CHIPS; OPTIMIZATION;

ACLV; CIRCUIT DELAY DISTRIBUTIONS; MANUFACTURABILITY; VARIATION;

PRODUCT DESIGN;

EID: 27944463118     PISSN: 0738100X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/dac.2005.193835     Document Type: Conference Paper

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