Statistical methods for the estimation of process variation effects on circuit operation

IEEE Transactions on Electronics Packaging Manufacturing

Volumn 28, Issue 4, 2005, Pages 364-375

  Mutlu, Ayhan A ^a,b   Rahman, Mahmud ^b  

^a INTEL CORPORATION   (United States)

^b SANTA CLARA UNIVERSITY   (United States)

Author keywords

Design for manufacturability (DFM); Optimization; Process variation; Response surface models (RSM); Statistical methods; Technology computer aided design (TCAD)

Indexed keywords

CMOS INTEGRATED CIRCUITS; COMPUTER AIDED DESIGN; ESTIMATION; LITHOGRAPHY; MATHEMATICAL MODELS; OPTIMIZATION; STATISTICAL METHODS;

DESIGN FOR MANUFACTURABILITY (DFM); PROCESS VARIATION; RESPONSE SURFACE MODELS (RSM); TECHNOLOGY COMPUTER AIDED DESIGN (TCAD);

INTEGRATED CIRCUIT MANUFACTURE;

EID: 27844474262     PISSN: 1521334X     EISSN: None     Source Type: Journal    
DOI: 10.1109/TEPM.2005.856534     Document Type: Article

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