On-line characterisation of radiofrequency magnetron sputter deposition of SiOx using elastic recoil detection

Thin Solid Films

Volumn 494, Issue 1-2, 2006, Pages 13-17

  Van Hattum, E D ^a   Arnoldbik, W M ^a   Palmero, A ^a   Habraken, F H P M ^a  

^a UTRECHT UNIVERSITY   (Netherlands)

Author keywords

1 Elastic recoil detection (ERD); 2 In situ analysis; 373 Plasma processing and deposition; 437 Silicon oxide

Indexed keywords

CHARACTERIZATION; FILM GROWTH; ION BEAMS; MAGNETRON SPUTTERING; NATURAL FREQUENCIES; SILICA; SPUTTER DEPOSITION;

ELASTIC RECOIL DETECTION (ERD); GROWTH RATE; IN SITU ANALYSIS; ON-LINE CHARACTERIZATION;

THIN FILMS;

EID: 27844433620     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.07.153     Document Type: Conference Paper

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