Electronic sputtering of silicon suboxide films by swift heavy ions

Physical Review Letters

Volumn 94, Issue 24, 2005, Pages

  Arnoldbik, W M ^a   Zeijlmans Van Emmichoven, P A ^a   Habraken, F H P M ^a  

^a UTRECHT UNIVERSITY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONIC SPUTTERING; SILICON SUBOXIDE FILMS;

COPPER; ELECTRONIC STRUCTURE; HEAVY IONS; SPUTTERING;

SILICON COMPOUNDS;

EID: 27744549257     PISSN: 00319007     EISSN: 10797114     Source Type: Journal    
DOI: 10.1103/PhysRevLett.94.245504     Document Type: Article

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