-
3
-
-
0043255271
-
-
R. Erlandsson, G. M. McClelland, C. M. Mate, and S. Chiang, J. Vac. Sci. Technol. A 6, 266 (1988).
-
(1988)
J. Vac. Sci. Technol. A
, vol.6
, pp. 266
-
-
Erlandsson, R.1
McClelland, G.M.2
Mate, C.M.3
Chiang, S.4
-
5
-
-
0040571122
-
-
IEEE, New York
-
M. Tortonese, H. Yamada, R. C. Barrett, and C. F. Quate, in Proceeding of Transducers '91 (IEEE, New York, 1991). p. 448.
-
(1991)
Proceeding of Transducers '91
, pp. 448
-
-
Tortonese, M.1
Yamada, H.2
Barrett, R.C.3
Quate, C.F.4
-
6
-
-
4243143903
-
-
G. Neubauer, S. R. Cohen, G. M. McClelland, D. E. Horn, and C. M. Mate. Rev. Sci. Instrum. 61, 3384 (1990).
-
(1990)
Rev. Sci. Instrum.
, vol.61
, pp. 3384
-
-
Neubauer, G.1
Cohen, S.R.2
McClelland, G.M.3
Horn, D.E.4
Mate, C.M.5
-
7
-
-
0001520372
-
-
S. R. Manalis, S. C. Minne, A. Atalar, and C. F. Quate, Appl. Phys. Lett. 69, 3944 (1996).
-
(1996)
Appl. Phys. Lett.
, vol.69
, pp. 3944
-
-
Manalis, S.R.1
Minne, S.C.2
Atalar, A.3
Quate, C.F.4
-
8
-
-
0000455920
-
-
G. G. Yaralioglu, A. Atalar, S. R. Manalis, and C. F. Quate, J. Appl. Phys. 83, 7405 (1998).
-
(1998)
J. Appl. Phys.
, vol.83
, pp. 7405
-
-
Yaralioglu, G.G.1
Atalar, A.2
Manalis, S.R.3
Quate, C.F.4
-
9
-
-
0039978292
-
-
Heidelberg. Germany, 25-29 January
-
M. Lutwyche, C. Andreoli, G. Binnig, J. Bugger, U. Drechsler, W. Haeberle, H. Rohrer, H. Rothuizen, and P. Vettiger, Proceedings of the IEEE International Workshop on Microelectro-Mechanical Systems (MEMS 98), Heidelberg. Germany, 25-29 January 1998.
-
(1998)
Proceedings of the IEEE International Workshop on Microelectro-mechanical Systems (MEMS 98)
-
-
Lutwyche, M.1
Andreoli, C.2
Binnig, G.3
Bugger, J.4
Drechsler, U.5
Haeberle, W.6
Rohrer, H.7
Rothuizen, H.8
Vettiger, P.9
-
10
-
-
0001520375
-
-
B. W. Chui, T. D. Stowe, T. W. Kenny, H. J. Mamin, B. D. Terris, and D. Rugar, Appl. Phys. Lett. 69, 2767 (1996).
-
(1996)
Appl. Phys. Lett.
, vol.69
, pp. 2767
-
-
Chui, B.W.1
Stowe, T.D.2
Kenny, T.W.3
Mamin, H.J.4
Terris, B.D.5
Rugar, D.6
-
11
-
-
0031344594
-
-
R. P. Ried, H. J. Mamin, B. D. Terris, L. S. Fan, and D. Rugar, J. Microelectromech. Syst. 6, 294 (1997).
-
(1997)
J. Microelectromech. Syst.
, vol.6
, pp. 294
-
-
Ried, R.P.1
Mamin, H.J.2
Terris, B.D.3
Fan, L.S.4
Rugar, D.5
-
12
-
-
0000212074
-
-
S. C. Minne, G. Yaralioglu, S. R. Manalis, J. D. Adams, J. Zesch, A. Atalar, and C. F. Quate, Appl. Phys. Lett. 72, 2340 (1998).
-
(1998)
Appl. Phys. Lett.
, vol.72
, pp. 2340
-
-
Minne, S.C.1
Yaralioglu, G.2
Manalis, S.R.3
Adams, J.D.4
Zesch, J.5
Atalar, A.6
Quate, C.F.7
-
13
-
-
0033132598
-
-
P. Vettiger, J. Brugger, M. Despont, U. Drechsler, U. Durig, W. Haberle, M. Lutwyche, H. Rothuizen, R. Stutz, R. Widmer, and G. Binnig, J. Microelectron. Eng. 46, 11 (1999).
-
(1999)
J. Microelectron. Eng.
, vol.46
, pp. 11
-
-
Vettiger, P.1
Brugger, J.2
Despont, M.3
Drechsler, U.4
Durig, U.5
Haberle, W.6
Lutwyche, M.7
Rothuizen, H.8
Stutz, R.9
Widmer, R.10
Binnig, G.11
-
16
-
-
0001672390
-
-
H. P. Lang, R. Berger, C. Andreoli, J. Brugger, M. Despont, P. Vettiger, Ch. Gerber, J. K. Gimzewski, J. P. Ramseyer, E. Meyer, and H.-J. Güntherodt, Appl. Phys. Lett. 72, 383 (1998).
-
(1998)
Appl. Phys. Lett.
, vol.72
, pp. 383
-
-
Lang, H.P.1
Berger, R.2
Andreoli, C.3
Brugger, J.4
Despont, M.5
Vettiger, P.6
Gerber, Ch.7
Gimzewski, J.K.8
Ramseyer, J.P.9
Meyer, E.10
Güntherodt, H.-J.11
-
17
-
-
0040571119
-
-
MOSIS Service (www.mosis.org).
-
-
-
-
18
-
-
0039978309
-
-
www.vcsle.ch.
-
-
-
-
19
-
-
73149087426
-
-
H. P. Lang, R. Berger, F. Battiston, J.-P. Ramseyer, E. Meyer, C. Andreoli, J. Brugger, P. Vettiger, M. Despont, T. Mezzacasa, L. Scandella, H. J. Güntherodt, Ch. Gerber, and J. K. Gimzewski. Appl. Phys. A: Mater. Sci. Process. 66, S61 (1998).
-
(1998)
Appl. Phys. A: Mater. Sci. Process.
, vol.66
-
-
Lang, H.P.1
Berger, R.2
Battiston, F.3
Ramseyer, J.-P.4
Meyer, E.5
Andreoli, C.6
Brugger, J.7
Vettiger, P.8
Despont, M.9
Mezzacasa, T.10
Scandella, L.11
Güntherodt, H.J.12
Gerber, Ch.13
Gimzewski, J.K.14
-
20
-
-
0346774693
-
-
S. R. Manalis, S. C. Minne, C. F. Quate, G. G. Yaralioglu, and A. Atalar, Appl. Phys. Lett. 70, 3311 (1997).
-
(1997)
Appl. Phys. Lett.
, vol.70
, pp. 3311
-
-
Manalis, S.R.1
Minne, S.C.2
Quate, C.F.3
Yaralioglu, G.G.4
Atalar, A.5
|