Response of a biologically inspired MEMS differential microphone diaphragm

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4743, Issue , 2002, Pages 91-98

  Tan, L ^a   Miles, R N ^a   Weinstein, M G ^b   Miller, R A ^b   Su, Q ^a   Cui, W ^a   Gao, J ^a  

^a STATE UNIVERSITY OF NEW YORK   (United States)

^b CHARLES STARK DRAPER LABORATORY   (United States)

Author keywords

Acoustic sensor; Biomimetic; MEMS; Microphone

Indexed keywords

ACOUSTIC EQUIPMENT; ACOUSTIC NOISE; BIOMIMETIC MATERIALS; DIAPHRAGMS; MICROPHONES; SEMICONDUCTING SILICON; STRESS ANALYSIS;

ACOUSTIC SENSORS;

BIOSENSORS;

EID: 0036438953     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.448378     Document Type: Conference Paper

References (4)

1. A. Mason, M. Oshinsky, and R. Hoy, "Hyperacute directional hearing in a micro-scale auditory system", Nature 4/5/01.
2. Miles, R.N., Robert, R., and Hoy, R.R. [1995] "Mechanically coupled ears for directional hearing in the parasitoid fly Ormia ochracea." Journal of the Acoustical Society of America 98 (6) 3059-3070.
3. Gabrielson, T. [1993] "Mechanical-thermal noise in micromachined acoustic and vibration sensors." IEEE Transactions on Electron Devices 40 (5) 903-909.
4. Ronald N. Miles, Lin Tan, Weili Cui, Quang Su, Mihir Shetye, "Design of a Biologically Inspired Directional Microphone", Proceedings of the 2001 Meeting of the MSS Specialty Group on Battlefield Acoustic and Seismic Sensing, Magnetic and Electric Field Sensors Johns Hopkins University, Laurel MD, Oct. 23, 2001.