Development of RF-MEMS switch on PCB substrates with polyimide planarization

IEEE Sensors Journal

Volumn 5, Issue 5, 2005, Pages 950-955

  Ghodsian, Bahram ^a,b,c,e   Jung, Changwon ^a,b,f   Cetiner, Bedri A ^a,b,d,g   De Flaviis, Franco ^a,b  

^a IEEE   (United States)

^b University of California at Irvine   (United States)

^c XCom Wireless   (United States)

^d MOREHEAD STATE UNIVERSITY   (United States)

^e XCOM Wireless Inc   (United States)

^f UNIVERSITY OF CALIFORNIA   (United States)

^g Microwave Laminate Compatible RF MEMS Technology   (United States)

Author keywords

Microelectromechanical systems (MEMS); Polyimide; Printed circuit board (PCB); Radio frequency (RF); Switch

Indexed keywords

METALLIC MEMBRANES; POLYIMIDE PLANARIZATION; RADIO FREQUENCY (RF); SWITCH;

FABRICATION; MICROELECTROMECHANICAL DEVICES; POLYIMIDES; PRINTED CIRCUIT BOARDS; RADIO FREQUENCY AMPLIFIERS;

ELECTRIC SWITCHES;

EID: 27744456830     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2005.854148     Document Type: Article

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