Monolithic integration of RF MEMS switches with a diversity antenna on PCB substrate

IEEE Transactions on Microwave Theory and Techniques

Volumn 51, Issue 1 II, 2003, Pages 332-335

  Cetiner, B A ^a   Qian, J Y ^a   Chang, H P ^a   Bachman, M ^a   Li, G P ^a   De Flaviis, F ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Low temperature process; Monolithic integration; Printed circuit board (PCB); RF microelectromechanical system (MEMS) switches

Indexed keywords

ANTENNAS; DIVERSITY RECEPTION; ELECTRIC NETWORK TOPOLOGY; INDUCTIVELY COUPLED PLASMA; INTEGRATED CIRCUIT LAYOUT; LOW TEMPERATURE OPERATIONS; MASKS; MICROELECTROMECHANICAL DEVICES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PRINTED CIRCUIT BOARDS; SEMICONDUCTOR SWITCHES; SILICON NITRIDE;

DIVERSITY ANTENNA; MICROELECTROMECHANICAL SWITCHES; MICROWAVE LAMINATE PRINTED CIRCUIT BOARD; MONOLITHIC INTEGRATION;

MONOLITHIC MICROWAVE INTEGRATED CIRCUITS;

EID: 0037252954     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMTT.2002.806521     Document Type: Article

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