30 GHz tuned MEMS switches

IEEE MTT-S International Microwave Symposium Digest

Volumn 4, Issue , 1999, Pages 1511-1514

  Muldavin, Jeremy B ^a   Rebeiz, Gabriel M ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; DIELECTRIC FILMS; ELECTRIC POTENTIAL; ELECTROSTATICS; INSERTION LOSSES; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; SEMICONDUCTING SILICON; TUNING; WAVEGUIDES;

AUTOMOTIVE SWITCHES; CROSS SWITCH; ELECTROSTATIC SWITCHES; PULLDOWN VOLTAGE; RESONANT TUNING; RETURN LOSS;

ELECTRIC SWITCHES;

EID: 0033359856     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)