Parametric model of MEMS capacitive switch operating at microwave frequencies

IEEE MTT-S International Microwave Symposium Digest

Volumn 2, Issue , 2000, Pages 1229-1232

  Qian, J Y ^a   Li, G P ^a   De Flaviis, F ^a  

^a Mat Modeling Lab Sch Eng U   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMAGNETIC MODEL; FULL WAVE ANALYSIS; MEMS SWITCHES;

COMPUTER AIDED DESIGN; COMPUTER SIMULATION; COMPUTER SOFTWARE; ELECTROMAGNETIC FIELD THEORY; FINITE ELEMENT METHOD; MICROELECTROMECHANICAL DEVICES; MICROWAVES; SCATTERING PARAMETERS; WAVEGUIDES;

SEMICONDUCTOR SWITCHES;

EID: 0033678335     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (4)

1. F. D. Flaviis and R. Coccioli, "Combined mechanical and electrical analysis of microelectromechanical switch for RF applications," presented at European Microwave Conference EUMC 1999, Munich, Germany, 1999.
2. C. Goldsmith, T. H. Lin, B. Powers, W. R. Wu, and B. Norvell, "Micromechanical membrane switches for microwave applications," presented at IEEE MTT-S Digest, Orlando Florida May 16, 1995.
3. C. L. Goldsmith, Z. Yao, S. Eshelman, and D. Denniston, "Performance of Low-Loss RF MEMS Capacitive Switches," IEEE Microwave and Guided Wave Letters, vol. 8, pp. 269-271, 1998.
4. J. B. Muldavin and G. M. Rebeiz, "30 GHz Tuned Mems Switched," IEEE MTT-Symposium, 1998.