Collective Thomson scattering experiments on a tin vapor discharge in the prepinch phase

Physical Review E - Statistical, Nonlinear, and Soft Matter Physics

Volumn 70, Issue 5 2, 2004, Pages

  Rieft, E R ^a   Van Der Mullen, J J A M ^a   Kroesen, G M W ^a   Banine, V ^b   Koshelev, K N ^c  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b ASML   (Netherlands)

^c ISAN   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

BRILLOUIN SCATTERING; CARRIER CONCENTRATION; ELECTRODES; IONIZATION; LASER PULSES; LITHOGRAPHY; MATHEMATICAL MODELS; NEODYMIUM LASERS; PLASMA HEATING; PLASMA THEORY; TIN; ULTRAVIOLET RADIATION; ULTRAVIOLET SPECTROSCOPY; VACUUM;

EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY; PREPINCH PHASE; STARK BROADENING; THOMPSON SCATTERING (TS);

ELECTRON SCATTERING;

EID: 37649028878     PISSN: 15393755     EISSN: None     Source Type: Journal    
DOI: 10.1103/PhysRevE.70.056413     Document Type: Article

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