Characterization of a vacuum-arc discharge in tin vapor using time-resolved plasma imaging and extreme ultraviolet spectrometry

Physical Review E - Statistical, Nonlinear, and Soft Matter Physics

Volumn 71, Issue 2, 2005, Pages

  Kieft, E R ^a   Van Der Mullen, J J A M ^a   Kroesen, G M W ^a   Banine, V ^b   Koshelev, K N ^c  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b ASML   (Netherlands)

^c ISAN   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

CHIRAL; DEFECT STRUCTURES; SPLAY; SUSPENDED FILMS;

CRYSTAL DEFECTS; CRYSTAL ORIENTATION; DISTORTION (WAVES); ELASTICITY; IONS; LAPLACE TRANSFORMS; LIGHT POLARIZATION; MATHEMATICAL MODELS; SUSPENSIONS (FLUIDS); THIN FILMS; VISCOSITY OF LIQUIDS;

SMECTIC LIQUID CRYSTALS;

EID: 41349085634     PISSN: 15393755     EISSN: 15502376     Source Type: Journal    
DOI: 10.1103/PhysRevE.71.026409     Document Type: Article

References (8)

1. E. R. Kieft, J. J. A. M. van der Mullen, G. M. W. Kroesen, and V. Banine, Phys. Rev. E 68, 056403 (2003).
2. Proceedings of the EUV Source Workshop, International SEMATECH, Antwerp, Belgium, 2003, edited by V. Bakshi (unpublished).
3. R. D. Cowan, The Theory of Atomic Structure and Spectra (University of California Press, Berkeley, 1981) (code in a version for personal computers, edited by A. Kramida, at http://das101.isan.troitsk.ru/cowan.htm).
4. R. L. Kelly, Kelly Atomic Line Database, accesssible through http://cfa-www.harvard.edu/amdata/ampdata/kelly/kelly.html.
5. G. A. Johannesson, T. Lundstrom, and L. Minnhagen, Phys. Scr. 6, 129 (1972).
6. C. E. Moore, Atomic Energy Levels: As Derived from the Analysis of Optical Spectra (US National Bureau of Standards, Washington, D.C., 1971).
7. D. Colombant and G. F. Tonon, J. Appl. Phys. 44, 3524 (1973).
8. E. R. Kieft, J. J. A. M. van der Mullen,G. M. W. Kroesen, V. Banine, and K. N. Koshelev, Phys. Rev. E 70, 056413 (2004).