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Volumn 70, Issue 6 2, 2004, Pages
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Stark broadening experiments on a vacuum arc discharge in tin vapor
b
ASML
(Netherlands)
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Author keywords
[No Author keywords available]
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Indexed keywords
CAMERAS;
CHARGE COUPLED DEVICES;
DATA ACQUISITION;
ELECTRIC FIELDS;
ELECTRON SCATTERING;
HIGH ENERGY LASERS;
LIGHT EMISSION;
LITHOGRAPHY;
MAGNETIC FIELDS;
SEMICONDUCTOR MATERIALS;
TIN;
VAPORIZATION;
STARK BROADENING DATA;
THOMSON SCATTERING;
TIN VAPOR;
VACUUM ARC DISCHARGES;
ELECTRIC ARCS;
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EID: 37649027466
PISSN: 15393755
EISSN: 15502376
Source Type: Journal
DOI: 10.1103/PhysRevE.70.066402 Document Type: Article |
Times cited : (23)
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References (20)
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