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Volumn 47, Issue 1, 2000, Pages 207-213
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Laser-processed thin-film transistors fabricated from sputtered amorphous-silicon films
a
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Author keywords
[No Author keywords available]
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Indexed keywords
AMORPHOUS FILMS;
CARRIER MOBILITY;
CHEMICAL VAPOR DEPOSITION;
EXCIMER LASERS;
HYDROGENATION;
SEMICONDUCTING ALUMINUM COMPOUNDS;
SEMICONDUCTING SILICON;
SEMICONDUCTOR DEVICE MANUFACTURE;
SUBSTRATES;
FULL MELT THRESHOLD;
GAS IMMERSION LASER DOPING;
LASER CRYSTALLIZATION;
POLYSILICON THIN FILM TRANSISTORS;
SPUTTERED SILICON FILMS;
THIN FILM TRANSISTORS;
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EID: 0033874029
PISSN: 00189383
EISSN: None
Source Type: Journal
DOI: 10.1109/16.817587 Document Type: Article |
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Times cited : (19)
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References (13)
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