Correlation of angle-resolved light scattering with the microfacet orientation of rough silicon surfaces

Optical Engineering

Volumn 44, Issue 7, 2005, Pages 1-12

  Zhu, Qunzhi Z ^a   Zhang, Zhuomin M ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Correlation; Metrology; Reflectometers; Roughness; Scattering

Indexed keywords

ATOMIC FORCE MICROSCOPY; ETCHING; MATHEMATICAL MODELS; OPTICAL CORRELATION; PROBABILITY DISTRIBUTIONS; REFLECTOMETERS; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON WAFERS; SURFACE ROUGHNESS; SURFACE TREATMENT;

ANGLE-RESOLVED LIGHT SCATTERING; BIDIRECTIONAL REFLECTANCE DISTRIBUTION FUNCTION (BRDF); MICROFACET ORIENTATION; MICROROUGH SILICON SURFACES;

LIGHT SCATTERING;

EID: 27144433551     PISSN: 00913286     EISSN: 15602303     Source Type: Journal    
DOI: 10.1117/1.1948816     Document Type: Article

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