A scatterometer for measuring the bidirectional reflectance and transmittance of semiconductor wafers with rough surfaces

Review of Scientific Instruments

Volumn 74, Issue 11, 2003, Pages 4885-4892

  Shen, Y J ^a   Zhu, Q Z ^b   Zhang, Z M ^b  

^a UNIVERSITY OF FLORIDA   (United States)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DISTRIBUTION FUNCTIONS; SCATTEROMETERS;

GEOMETRICAL OPTICS; LIGHT REFLECTION; LIGHT SCATTERING; OPACITY; OPTICAL FIBER COUPLING; PHOTODIODES; SEMICONDUCTOR LASERS; STRAY LIGHT; SURFACE ROUGHNESS;

SILICON WAFERS;

EID: 0345377001     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1614853     Document Type: Article

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