Modeling and design of polymer-based tunneling accelerometers by ANSYS/MATLAB

IEEE/ASME Transactions on Mechatronics

Volumn 10, Issue 4, 2005, Pages 468-472

  Xue, Wei ^a   Wang, Jing ^a   Cui, Tianhong ^a  

^a University of Minnesota   (United States)

Author keywords

Feedback control system; Hot embossing; Polymer; Tunneling accelerometer

Indexed keywords

ACCELEROMETERS; ACTUATORS; APPROXIMATION THEORY; ELECTROSTATICS; ETCHING; FEEDBACK CONTROL; LITHOGRAPHY; MATHEMATICAL MODELS; POLYMETHYL METHACRYLATES; SENSORS;

FEEDBACK CONTROL SYSTEM; HOT EMBOSSING; POLYMER-BASED TUNNELING ACCELEROMETERS; SYSTEM-LEVEL ANALYSIS;

CONTROL SYSTEM SYNTHESIS;

EID: 27144431974     PISSN: 10834435     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMECH.2005.852451     Document Type: Article

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