Mathematical model for a micromachined accelerometer

Transactions of the Institute of Measurement & Control

Volumn 18, Issue 2, 1996, Pages 92-98

  Lewis, C P ^a   Kraft, M ^a   Hesketh, T G ^a  

^a Institute for Clean Growth and Future Mobility   (United Kingdom)

Author keywords

Accelerometer; mathematical model; micromachined; simulation

Indexed keywords

CLOSED LOOP CONTROL SYSTEMS; COMPUTER SIMULATION; CONTROL SYSTEM SYNTHESIS; DAMPING; ELECTRODES; MATHEMATICAL MODELS; MICROMACHINING;

ELECTROSTATIC FEEDBACK; MICROMACHINED ACCELEROMETERS;

ACCELEROMETERS;

EID: 0029714999     PISSN: 01423312     EISSN: None     Source Type: Journal    
DOI: 10.1177/014233129601800204     Document Type: Article

References (11)

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