Robust controller design via μ-synthesis for high-performance micromachined tunneling accelerometers

Proceedings of the American Control Conference

Volumn 1, Issue , 1999, Pages 247-252

  Liu, Cheng Hsien ^a   Rockstad, Howard K ^a   Kenny, Thomas W ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; ELECTRON TUNNELING; MICROELECTROMECHANICAL DEVICES; PARAMETER ESTIMATION; ROBUSTNESS (CONTROL SYSTEMS); TRANSDUCERS;

PROOF MASS;

CONTROL SYSTEM SYNTHESIS;

EID: 0033283431     PISSN: 07431619     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (20)