Transient, interferometric imaging of polycrystalline silicon MEMS devices during laser heating

Microscale Thermophysical Engineering

Volumn 8, Issue 1, 2004, Pages 43-59

  Rogers, James W ^a,b   Phinney, Leslie M ^a  

^a University of Illinois at Urbana Champaign   (United States)

^b MURRAY STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL MICROSTRUCTURE; IMAGING TECHNIQUES; INTERFEROMETRY; LASER APPLICATIONS; MICROELECTROMECHANICAL DEVICES; SUBSTRATES; VISUALIZATION;

LASER HEATING; MICROELECTROMECHANICAL SYSTEMS; POLYCRYSTALLINE SILICON;

POLYCRYSTALLINE MATERIALS;

EID: 1542375806     PISSN: 10893954     EISSN: None     Source Type: Journal    
DOI: 10.1080/10893950490272920     Document Type: Article

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