Negative potential dissolution (NPD)-advanced and rapid texturing method of as-cut silicon

Electrochimica Acta

Volumn 50, Issue 27, 2005, Pages 5313-5321

  Gordon, N ^a   Starosvetsky, D ^a   Ein Eli, Y ^a  

^a TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

Author keywords

NPD mechanism; Silicon NPD; Surface texturing

Indexed keywords

DISSOLUTION; ETCHING; MATHEMATICAL TRANSFORMATIONS; MORPHOLOGY; POTASSIUM COMPOUNDS; SURFACE TENSION; TEXTURES;

NEGATIVE POTENTIAL DISSOLUTION (NPD); NPD MECHANISM; SILICON NPD; SURFACE TEXTURING;

SILICON;

EID: 24644506243     PISSN: 00134686     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.electacta.2005.03.008     Document Type: Article

References (37)

1. S.W. Park, D.S. Kim, and S.H. Lee J. Mater. Sci. 12 2001 619
2. M.A. Green, J. Zhao, A. Wang, and S.R. Wenham IEEE Electron Device Lett. 13 1992 317
3. J. Qian, S. Steegen, E. Vandor Poorten, D. Reynolds, and H. Van Brussel Int. J. Machine Tools Manuf. 42 2002 1657
4. P. Velinden, O. Evrard, E. Mazy, and A. Crahay Solar Energy Solar Cells 26 1992 71
5. J. Szlufcik, F. Duerinckx, J. Horzel, E. Van Kerchaver, H. Dekkers, S. De Wolf, P. Choulat, C. Allebe, and J. Nijs Solar Energy Mater. Solar Cells 74 2002 155
6. D.S. Kim, K.Y. Lee, S.H. Won, M.J. Cho, S.W. Park, and S.H. Lee Curr. Appl. Phys. 1 2001 505
7. E. Vazsonyi, K. De Clercq, R. Einhaus, E. Van Kerschaver, K. Said, J. Poortmans, J. Szluficik, and J. Nijs Solar Energy Mater. Solar Cells 57 1999 179
8. H. Siedel, L. Csepregi, A. Heuberger, and H. Baumgärtel J. Electrochem. Soc. 137 1990 3612
9. H. Siedel, L. Csepregi, A. Heuberger, and H. Baumgärtel J. Electrochem. Soc. 137 1990 3626
10. A. Reisman, M. Berkenblit, S.A. Chan, F.B. Kaufman, and D.C. Green J. Electrochem. Soc. 126 1979 1406
11. M. Shikida, K. Tokoro, D. Uchikawa, and K. Sato J. Micromech. Microeng. 10 2000 522
12. M. Shikida, K. Sato, K. Tokoro, and D. Uchikawa Sens. Actuators 80 2000 179
13. K. Sato, M. Shikida, Y. Matsushima, T. Yamashiro, K. Asaumi, Y. Iriye, and M. Yamamoto Sens. Actuators A 64 1998 87
14. R.M. Finne, and D.L. Klein J. Electrochem. Soc. 114 1967 965
15. D.B. Lee J. Appl. Phys. 40 1969 4569
16. I. Zubel, I. Barycka, K. Kotowska, and M. Kramkowska Sens. Actuators A 87 2001 163
17. É. Vázsonyi, Z. Vértesy, A. Tóth, and J. Szlufcik J. Micromech. Microeng. 13 2003 165
18. J. Chen, L. Liu, Z. Li, Z. Tan, Q. Jiang, H. Fang, Y. Xu, and Y. Liu Sens. Actuators A 96 2002 152
19. E. van Veenendaal, K. Sato, M. Shikida, A.J. Nijdan, and J. van Suchtelen Sens. Actuators A 93 2001 232
20. I. Zubel Sens. Actuators 84 2000 116
21. I. Zubel, and I. Barycka Sens. Actuators A 70 1998 250
22. N. Gabouze Surf. Sci. 507-510 2002 429
23. R.E. Oosterbroek, J.W. Berenschot, H.V. Jansen, A.J. Nijdam, G. Pandraud, A. van den Berg, and M.C. Elewenspoek J. Microelec. Micromech. Syst. 3 2000 390
24. B.C.S. Chou, C.N. Chen, and J.S. Shie Sens. Actuators 75 1999 271
25. G. Ensell J. Micromech. Microeng. 5 1995 1
26. G. Kuchler, D. Scholten, G. Muller, J. Krinke, R. Auer, and R. Brendel Proceedings of the 16th European Photovoltaic Solar Energy Conference, vol. 2 Glasgow, UK, May 1-5 2000 1695
27. Y. Ein-Eli, and D. Strarosvetsky Electrochem. Solid State Lett. 6 2003 C47
28. D. Starosvetsky, N. Gordon, and Y. Ein-Eli Electrochem. Solid State Lett. 7 2004 G75
29. D. Starosvetsky, M. Kovler, and Y. Ein-Eli Electrochem. Solid State Lett. 7 2004 G168
30. E.D. Palik, J.W. Faust Jr., H.F. Gray, and R.F. Greene J. Electrochem. Soc. 129 1982 2051
31. I. Zubel J. Elechtochem. Soc. 150 2003 C391
32. K. Kobayashi, and E. Ishikawa Surf. Sci. 540 2003 431
33. S.A. Campbell, D.J. Schiffrin, and P.J. Tufton J. Electroanal. Chem. 344 1993 211
34. E.D. Palik, V.M. Bermudez, and O.J. Glembocki J. Elctrochem. Soc. 132 1985 135
35. P. Allongue, V. Costa-Kieling, and H. Gerischer J. Elctrochem. Soc. 140 1993 1009
36. P. Allongue, V. Costa-Kieling, and H. Gerischer J. Elctrochem. Soc. 140 1993 1018
37. Y. Ein-Eli, D. Strarosvetsky, unpublished results.